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Semiconductor Industry Solutions using Omron Sensing & Control


	Displacement Measurement through a View Port
	High-Precision Positioning
	Process Data Collection
	Semiconductor Manufacturing Process
	Faster System Start-up
	High Speed Analog Process Control
	Uniform Wafer Heating
	In-plane Uniform Control
	Multi-point Uniform Temperature Control
	Harmonizing Flexibility, Speed, and Advanced Motion Control Operations
	Accelerate Global Operation by Multi-vendor Field Network System
	Space, Wiring and Setting Saving Controller

Case Studies :: Semiconductor Industry Solutions :: Power Supply

Loop Controller Allows High Speed and High Accuracy Analog Process Control

Omron's Product:

• CJ1G-CPU45P Loop Control Unit

• NS12 Programmable Terminal

• CJ1W-PTS15 Analog Input Unit

With gradient temperature control algorithm, a uniform surface with high accuracy can be achieved.
Can easily develop high-precision analog control program with device block.
With high-speed multipoint temperature control, high throughput can be realized (PID control period of 10ms).

System Configuration Diagram

Result of Implementation

Set Point Response Temperature Difference: 1/5

Disturbance Response Temperature Difference: Below 1/5

Temperature Uniformity Time: Below 1/2

Comparison Graph